4. Radiation imagery chemistry: process, composition, or product th
  5. Imaging affecting physical property of radiation sensitive...
  6. Processing feature prior to imaging

Krishnan Shrinivasan

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Apparatus and methods for processing semiconductor...

Cleaning and liquid contact with solids – Apparatus – With heating – cooling or heat exchange means
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Apparatus for maintaining wafer back side and edge exclusion...

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
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Measurement of substrate temperature in a process chamber...

Electric heating – Heating devices – With power supply and voltage or current regulation or...
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Method and apparatus for removing photoresist and post-etch...

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
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Method and apparatus for removing post-etch residues and...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Profile ID: LFUS-PAI-P-2071371

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