4. Single-crystal, oriented-crystal, and epitaxy growth processes;
  5. Apparatus

Kozaburo Yano

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Apparatus for producing polycrystalline silicon sheets and...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus
Reexamination Certificate

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Thin plate manufacturing method and thin plate manufacturing...

Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal
Reexamination Certificate

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Thin sheet production method and thin sheet production device

Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal
Reexamination Certificate

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