4. Semiconductor device manufacturing: process
  5. Including control responsive to sensed condition
  6. Optical characteristic sensed

Kouichirou Hayashida

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Method of evaluating silicon wafers

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
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Nitrogen doped silicon wafer and manufacturing method thereof

Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from liquid or supercritical state – Having pulling during growth
Reexamination Certificate

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Silicon wafer and method for manufacture thereof, and method...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from liquid or supercritical state – Having pulling during growth
Reexamination Certificate

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Profile ID: LFUS-PAI-P-705183

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