4. Metal working
  5. Method of mechanical manufacture
  6. Impeller making

Klaus Breitschwerdt

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Device and method for anisotropic plasma etching of a...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Reexamination Certificate

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Device and method for anisotropic plasma etching of a...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Device and method for etching a substrate by using an...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With plasma generation means remote from processing chamber
Reexamination Certificate

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Device and method for etching a substrate by using an...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Holding device, in particular for fixing a semiconductor...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Profile ID: LFUS-PAI-P-1205421

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