4. Coating apparatus
  5. Gas or vapor deposition
  6. Multizone chamber

Kiyofumi Nishii

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Apparatus for heat processing a substrate

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Apparatus for heat-treating wafer by light-irradiation and devic

Electric heating – Heating devices – With power supply and voltage or current regulation or...
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Substrate heat treatment apparatus

Heating – Work chamber having heating means – Work chamber having gaseous material supply or removal...
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Profile ID: LFUS-PAI-P-1527159

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