4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with coating step

Keyvan Khajehnouri

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Mechanism for bow reduction and critical dimension control...

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
Reexamination Certificate

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Method for etching silicon dioxide using fluorocarbon gas chemis

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Profile ID: LFUS-PAI-P-207256

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