4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material

Kevin Hsieh

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Deposition method with improved step coverage

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material
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Method of photolithography

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Reexamination Certificate

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Self-aligned silicide process

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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