4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

Kentaro Oshimo

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Method and apparatus for forming a film on an object to be...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Processing device using shower head structure and processing...

Coating processes – Coating by vapor – gas – or smoke – Base supplied constituent
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Profile ID: LFUS-PAI-P-2463522

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