4. Electricity: electrical systems and devices
  5. Electric charge generating or conducting means
  6. Use of forces of electric charge or field

Kent Rossman

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Controlled method of silicon-rich oxide deposition using...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Deposition of amorphous silicon films by high density plasma...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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High density plasma chemical vapor deposition (HDP-CVD)...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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In situ wafer heat for reduced backside contamination

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
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In situ wafer heat for reduced backside contamination

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Profile ID: LFUS-PAI-P-140001

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