4. Coating processes
  5. Coating by vapor, gas, or smoke
  6. Mixture of vapors or gases utilized

Kenneth A. Monnig

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Method and apparatus for deposition of tungsten silicides

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Method and apparatus for deposition of tungsten silicides

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Patent

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Method for applying a uniform coating to integrated circuit wafe

Fishing – trapping – and vermin destroying
Patent

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Profile ID: LFUS-PAI-P-1023769

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