4. Optics: measuring and testing
  5. By light interference
  6. Having shearing

Kenneth A. Goldberg

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Fourier-transform and global contrast interferometer...

Optics: measuring and testing – By light interference – Having shearing
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Graphical user interface for image acquisition and processing

Image analysis – Image transformation or preprocessing
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Method and apparatus for inspecting an EUV mask blank

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Profile ID: LFUS-PAI-P-2115017

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