4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. With measuring, testing, or inspecting

Keith J. Brankner

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Method and system for identifying process conditions

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
Patent

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Method of growing surface aluminum nitride on aluminum films...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
Reexamination Certificate

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System and method for anisotropic etching of silicon nitride

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Profile ID: LFUS-PAI-P-822125

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