4. Coating apparatus
  5. With means to centrifuge work

Kazutoshi Yano

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Method of coating film, coating unit, aging unit, solvent...

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Method of coating film, coating unit, aging unit, solvent...

Coating apparatus – With vacuum or fluid pressure chamber
Reexamination Certificate

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Method of coating film, coating unit, aging unit, solvent...

Coating processes – Centrifugal force utilized
Reexamination Certificate

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Spin coating apparatus including aging unit and solvent...

Coating apparatus – With means to centrifuge work
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2019591

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