4. Semiconductor device manufacturing: process
  5. Coating of substrate containing semiconductor region or of...
  6. Insulative material deposited upon semiconductive substrate

Kaveh F. Niazi

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Apparatus for reducing plasma charge damage for plasma...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Method of reducing plasma charge damage for plasma processes

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2675239

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