4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Kaushal Singh

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Forming ferroelectric Pb(Zr,Ti)O3 films

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Reexamination Certificate

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Method and apparatus for controlling the deposition of a fluorin

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Profile ID: LFUS-PAI-P-307796

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