4. Abrading
  5. Work holder
  6. Work rotating

Kapila Wijekoon

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Carrier head with local pressure control for a chemical mechanic

Abrading – Work holder – Work rotating
Patent

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Carrier head with local pressure control for a chemical...

Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate

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Carrier head with local pressure control for a chemical...

Abrading – Machine – Rotary tool
Reexamination Certificate

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Endpoint monitoring with polishing rate change

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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Ion exchange materials for chemical mechanical polishing

Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1822538

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