4. Coating processes
  5. Coating by vapor, gas, or smoke
  6. Mixture of vapors or gases utilized

Kai Elers

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Metal nitride carbide deposition by ALD

Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Reexamination Certificate

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Metal nitride deposition by ALD with reduction pulse

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2909822

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