4. Coherent light generators
  5. Particular beam control device
  6. Nonlinear device

Jurgen Mlynek

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Methods and apparatus for forming submicron patterns on films

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
Reexamination Certificate

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Methods and apparatus for forming submicron patterns on films

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
Reexamination Certificate

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Tunable optical parametric oscillator

Coherent light generators – Particular beam control device – Nonlinear device
Patent

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Profile ID: LFUS-PAI-P-1031338

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