4. Etching a substrate: processes
  5. Nongaseous phase etching of substrate
  6. Recycling, regenerating, or rejunevating etchant

Jung-Taek Lim

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Method and apparatus for inspecting a substrate

Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate

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Method of scanning a substrate, and method and apparatus for...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Variable time etching system according to the accumulated...

Etching a substrate: processes – Nongaseous phase etching of substrate – Recycling – regenerating – or rejunevating etchant
Reexamination Certificate

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