4. Combustion
  5. Timer, programmer, retarder or condition responsive control
  6. Of or by burner feed supply heating structure

Jung-soo An

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Combustion device and method for use in a thermal oxidation furn

Combustion – Timer – programmer – retarder or condition responsive control – Of or by burner feed supply heating structure
Patent

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Tube apparatus for manufacturing semiconductor device

Coating apparatus – Gas or vapor deposition
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Profile ID: LFUS-PAI-P-422364

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