4. Radiant energy
  5. Inspection of solids or liquids by charged particles

Jun Pei

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Dual beam symmetric height systems and methods

Radiant energy – Photocells; circuits and apparatus – With circuit for evaluating a web – strand – strip – or sheet
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In-situ probe for optimizing electron beam inspection and...

Radiant energy – With charged particle beam deflection or focussing – With detector
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Simultaneous flooding and inspection for charge control in...

Radiant energy – Inspection of solids or liquids by charged particles
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Profile ID: LFUS-PAI-P-2579812

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