4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Jun Mihira

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Ion implantation apparatus for wafers

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Lamp annealer and method for controlling processing...

Electric heating – Heating devices – With power supply and voltage or current regulation or...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2129782

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