4. Brushing, scrubbing, and general cleaning
  5. Machines
  6. Brushing

Julia S. Svirchevski

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Method and system for chemical mechanical polishing pad...

Abrading – Abrading process – With tool treating or forming
Reexamination Certificate

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Method and system for cleaning a chemical mechanical...

Cleaning and liquid contact with solids – Processes – For metallic – siliceous – or calcareous basework – including...
Reexamination Certificate

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Method and system for cleaning a chemical mechanical...

Abrading – Abrading process – With tool treating or forming
Reexamination Certificate

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Method and system of cleaning a wafer after chemical...

Brushing – scrubbing – and general cleaning – Machines – Brushing
Reexamination Certificate

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Wafer scrubbing brush core

Brushing – scrubbing – and general cleaning – Implements – Brush or broom
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2064389

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