4. Semiconductor device manufacturing: process
  5. Including control responsive to sensed condition
  6. Optical characteristic sensed

Jonathan Daniel Chapple-Sokol

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Aluminum oxide LPCVD system

Coating processes – Measuring – testing – or indicating
Patent

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Borderless contact to diffusion with respect to gate...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Borderless contact to diffusion with respect to gate...

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified configuration
Reexamination Certificate

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Method of aluminum oxide low pressure chemical vapor deposition

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
Patent

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Profile ID: LFUS-PAI-P-155740

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