4. Heat exchange
  5. With retainer for removable article
  6. Including liquid heat exchange medium

Jonathan A. Jost

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Apparatus for controlling thermal transfer in a cyclic vacuum pr

Heat exchange – With retainer for removable article – Including liquid heat exchange medium
Patent

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Charged particle beam system having beam-defining slit formed by

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Profile ID: LFUS-PAI-P-1088816

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