4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

John P. Ruffell

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Apparatus for ion implantation

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Calorimetric dose monitor for ion implantation equipment

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Multistyli recording systems

Recorders – Plural-function recorder – distinguishable recordings – Plural markers and single record receiver
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Profile ID: LFUS-PAI-P-1081464

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