4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. Insulated gate formation

John Hartzell

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Method for fabricating silicon targets

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
Reexamination Certificate

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Semiconductor devices fabricated using sputtered silicon...

Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Amorphous semiconductor material
Reexamination Certificate

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Sputtered silicon target for fabrication of polysilicon thin...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Reexamination Certificate

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System and method for fabricating silicon targets

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Profile ID: LFUS-PAI-P-2529749

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