4. Electric heating
  5. Microwave heating

John D. Mai

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Microwave bonding of MEMS component

Semiconductor device manufacturing: process – Bonding of plural semiconductor substrates
Reexamination Certificate

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Microwave bonding of thin film metal coated substrates

Electric heating – Microwave heating
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2767687

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