Organic compounds -- part of the class 532-570 series
Organic compounds
Oxygen containing
Inventor
active
Copper CVD precursors with enhanced adhesion properties
Deposition and annealing of multicomponent ZrSnTi and HfSnTi...
Liquid precursor mixtures for deposition of multicomponent...
Liquid precursor mixtures for deposition of multicomponent...
Materials for adhesion enhancement of copper film on...
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