4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Application of energy to the gaseous etchant or to the...

Joel H. Young

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Apparatus for positioning objects for microscopic examination

Optical: systems and elements – Compound lens system – Microscope
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Method and apparatus for etching surfaces with atomic fluorine

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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