4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Jitske Trevor

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Method for etching polysilicon to have a smooth surface

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Reexamination Certificate

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Selective plasma etching of silicon nitride in presence of silic

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Sidewall polymer forming gas additives for etching processes

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Substrate monitoring method and apparatus

Coating processes – Measuring – testing – or indicating
Reexamination Certificate

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Profile ID: LFUS-PAI-P-60584

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