4. Coating apparatus
  5. Gas or vapor deposition
  6. Multizone chamber

Jim Tobin

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Drive system for a carrier head support structure

Abrading – Machine – Rotary tool
Reexamination Certificate

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Edge contact loadcup

Abrading – Precision device or process - or with condition responsive... – With indicating
Reexamination Certificate

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Edge contact loadcup

Abrading – Machine – Rotary tool
Reexamination Certificate

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Wafer transfer station for a chemical mechanical polisher

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Reexamination Certificate

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Wafer transfer station for a chemical mechanical polisher

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Profile ID: LFUS-PAI-P-1129006

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