4. Abrading
  5. Flexible-member tool, per se
  6. Laminate

JH Rhodes Company, Inc.

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Optimized grooving structure for a CMP polishing pad

Abrading – Flexible-member tool – per se – Interrupted or composite work face
Reexamination Certificate

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Stacked polyurethane polishing pad and method of producing...

Abrading – Flexible-member tool – per se – Laminate
Reexamination Certificate

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