4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Vacuum arc discharge coating

Jessie C. Shan

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Method for depositing high density plasma chemical vapor deposit

Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating
Patent

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Method for depositing high density plasma chemical vapor...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1921754

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