4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Coating, forming or etching by sputtering

Jenny Wu

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Magnetron sputtering cathode mechanism

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Physical vapor deposition reactor with circularly symmetric...

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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