4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. To form ohmic contact to semiconductive material

Jengyi Yu

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Biased H 2 etch process in deposition-etch-deposition gap fill

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Methods of filling constrained spaces with insulating...

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified configuration
Reexamination Certificate

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Methods of filling constrained spaces with insulating...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Systems and methods to retard copper diffusion and improve...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2145115

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