4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. Insulated gate formation

Jeffrey S. Abel

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Method for forming a tensile plasma enhanced nitride capping...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Reexamination Certificate

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Process for cleaning components using cleaning media

Cleaning and liquid contact with solids – Processes – Using solid work treating agents
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