4. Semiconductor device manufacturing: process
  5. Formation of semiconductive active region on any substrate
  6. Amorphous semiconductor

Jeff C. Olsen

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Method of depositing amorphous silicon based films having...

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Amorphous semiconductor
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Multiple frequency plasma chamber with grounding capacitor...

Coating apparatus – Gas or vapor deposition – With treating means
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