4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Jean E. Vollano

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Method for etching transistor gates using a hardmask

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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PURIFYING PROCESS OF TETRAKIS(FLUOROARYL)BORATE.MAGNESIUM...

Organic compounds -- part of the class 532-570 series – Organic compounds – Boron containing
Reexamination Certificate

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