4. Coating apparatus
  5. Gas or vapor deposition

Jason E. Babcoke

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Adsorption process for atomic layer deposition

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Reexamination Certificate

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Substrate temperature control in an ALD reactor

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Variable gas conductance control for a process chamber

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Variable gas conductance control for a process chamber

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With gas inlet structure
Reexamination Certificate

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Variable gas conductance control for a process chamber

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2409344

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