4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Japan Process Engineering Ltd.

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Apparatus for separating and removing a dangerous substance from

Gas separation – With nonliquid cleaning means for separating media – Solid agent cleaning member movingly contacts apparatus
Patent

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Chemical vapor deposition system with reduced material...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Heater unit for chemical vapor deposition systems

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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