4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Coating, forming or etching by sputtering

Jane Buehler

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Conductive integrated circuit metal alloy interconnections,...

Metal treatment – Stock – Copper base
Reexamination Certificate

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Methods of treating physical vapor deposition targets

Metal working – Method of mechanical manufacture – Assembling or joining
Reexamination Certificate

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Physical vapor deposition target

Metal treatment – Stock – Copper base
Reexamination Certificate

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Physical vapor target constructions

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2561999

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