4. Etching a substrate: processes
  5. Forming or treating optical article

Jan Verhoeven

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EUV illumination system

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Method of imaging a mask pattern on a substrate by means of...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Electron beam imaging
Reexamination Certificate

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Multilayer mirror with a variable refractive index

Etching a substrate: processes – Forming or treating optical article
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Multilayer system with protecting layer system and...

Stock material or miscellaneous articles – Composite – Of inorganic material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1759435

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