4. Photocopying
  5. Projection printing and copying cameras
  6. Distortion introducing or rectifying

James Tsacoyeanes

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Advanced illumination system for use in microlithography

Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate

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Advanced illumination system for use in microlithography

Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate

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Advanced illumination system for use in microlithography

Optical: systems and elements – Single channel simultaneously to or from plural channels – By surface composed of lenticular elements
Reexamination Certificate

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DUV scanner linewidth control by mask error factor compensation

Photocopying – Projection printing and copying cameras – Distortion introducing or rectifying
Reexamination Certificate

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DUV scanner linewidth control by mask error factor compensation

Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2576463

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