4. Semiconductor device manufacturing: process
  5. Gettering of substrate
  6. By implanting or irradiating

James M. Zahler

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Bonded intermediate substrate and method of making same

Semiconductor device manufacturing: process – Bonding of plural semiconductor substrates
Reexamination Certificate

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Method of using a germanium layer transfer to Si for...

Active solid-state devices (e.g. – transistors – solid-state diode – Heterojunction device – Light responsive structure
Reexamination Certificate

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Method of using a germanium layer transfer to Si for...

Active solid-state devices (e.g. – transistors – solid-state diode – Heterojunction device – Light responsive structure
Reexamination Certificate

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Wafer bonded epitaxial templates for silicon heterostructures

Semiconductor device manufacturing: process – Gettering of substrate – By implanting or irradiating
Reexamination Certificate

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Wafer bonded epitaxial templates for silicon heterostructures

Semiconductor device manufacturing: process – Gettering of substrate – By implanting or irradiating
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2423566

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