4. Semiconductor device manufacturing: process
  5. Coating of substrate containing semiconductor region or of...
  6. Insulative material deposited upon semiconductive substrate

James Jiahua Yu

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Cross-shaped resist dispensing system and method

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Method of using controlled resist footing on silicon nitride...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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System for and method of using developer as a solvent to...

Coating processes – Centrifugal force utilized
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2547454

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