4. Semiconductor device manufacturing: process
  5. Including control responsive to sensed condition
  6. Optical characteristic sensed

James Anthony O'Neill

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Aluminum oxide LPCVD system

Coating processes – Measuring – testing – or indicating
Patent

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Combined emissivity and radiance measurement for determination o

Thermal measuring and testing – Temperature measurement – In spaced noncontact relationship to specimen
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Combined emissivity and radiance measurement for the determinati

Thermal measuring and testing – Emissivity determination
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Control of etch selectivity

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
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Control of etch selectivity

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Profile ID: LFUS-PAI-P-155742

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