4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Coating, forming or etching by sputtering

Jacques Kools

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Dual collimated deposition apparatus and method of use

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Reexamination Certificate

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Dual collimated deposition apparatus and method of use

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Reexamination Certificate

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Zone-optimized mirrors and optical systems using same

X-ray or gamma ray systems or devices – Specific application – Lithography
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2607596

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