4. Furnaces
  5. Process
  6. Incinerating refuse

J. Leon Shohet

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Forming a buried insulator layer using plasma source ion implant

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
Patent

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Hazardous waste incinerator using cyclotron resonance plasma

Furnaces – Process – Incinerating refuse
Patent

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Polymeric thin layer materials

Stock material or miscellaneous articles – Composite – Of quartz or glass
Patent

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Reduction of plasma charge-induced damage in microfabricated...

Semiconductor device manufacturing: process – Repair or restoration
Reexamination Certificate

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Profile ID: LFUS-PAI-P-992242

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