4. Optics: measuring and testing
  5. Dimension
  6. Width or diameter

Isao Kawata

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Micropattern shape measuring system and method

Optics: measuring and testing – Dimension – Width or diameter
Reexamination Certificate

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Micropattern shape measuring system and method

Optics: measuring and testing – Dimension – Width or diameter
Reexamination Certificate

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Three-dimensional micropattern profile measuring system and...

Optics: measuring and testing – With plural diverse test or art
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2842533

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